Finite element model of MEMS accelerometer for accurate prediction of dynamic characteristics in biomechanical applications

This paper presents the developed 3D finite element model of a MEMS accelerometer with clearly defined geometry and properties, which were adjusted so as to accurately reproduce the dynamic behavior of the actual commercial seismic microsensor. Experimental characterization of the response of the actual microsensor on a vibro-stand confirmed the validity of the proposed modeling approach. Consequently, the developed numerical model enables convenient and fast determination of response of the accelerometer subjected to the real-world excitation. Implementation of the model is highly beneficial in industrial R&D applications, e.g. during testing of performance of biomechanical devices used for registration of movements of persons during fitness training, rehabilitation, etc.