The squeeze film effect on micro-electromechanical resonators

The air squeeze film damping effect on the dynamic responses of clamped micro- electromechanical resonators is investigated in this study. A dynamic model for a clamped micro-electromechanical resonator with the damping consideration is derived using Lagrange’s equation. The corresponding resonator eigen solutions are formulated and solved by employing the assumed-mode method. The effect of different parameters; i.e. the resonator size, ambient temperature and pressure on the squeeze film damping characteristics were simulated and investigated. The results indicate that the squeeze film damping effect may significantly affect the dynamic responses of micro-scale electromechanical resonator.