Abstract
This work presents a piezoelectric actuator which is designed to improve resolution for micrometer screws or motorized actuators such as actuators with stepper motors. Several modifications of piezoelectric actuator were implemented for closed-loop and open-loop applications. For closed-loop applications strain gages are used to obtain a feedback signal. As a result a resolution of displacement measurement up to 18 nm is achieved
About this article
Received
30 September 2010
Accepted
09 December 2010
Published
31 December 2010
Keywords
piezoelectric actuator
strain gage feedback
high resolution
Copyright © 2010 Vibroengineering
This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
